真空過濾器

Particulate Filters
Position	Pump inlet
Filters inlet/outlet	KF16,KF25,KF40,ISO63,ISO100
Vacuum Level	1 x 10-3 Torr
Temperature	-15°F (-26°C) to 220°F (104°C)
Element	Paper Element (99+% Efficient at 2 microns) 2)  Stainless Steel Wire Mesh Element 3)  Polyester Element (99+% Efficient at 5 microns) 4)  4 micron Z media Polyester Element (99+% Efficient at 4 microns) 5)  100 micron Z media Polyester Element (99+% Efficient at 100 microns) 6)  25 micron Z media Polyester Element (99+% Efficient at 25 microns) 7)  1 micron Z media Polyester Element (99+% Efficient at 1 microns)

Pump outlet Oil Mist Eliminators
Operate	9.97% removal efficiency at 0.3 micron diameter particles with maximum inlet concentration of 500 ppmw (parts per million by wt.) mineral oil or 1,000 ppmw synthetic oil
Temperature	Works between 4°C and 104°C
inlet/outlet	KF16,KF25
Replacement Element	1  pieces/set