擴散泵浦
63/150C
100/300C
160/700C
250/2000C
| 型號 | 63/150C | 100/300C | 160/700C | 250/2000C |
| 泵浦抽氣速度 | N2: 150 L/s H2: 225 L/s | N2: 300 L/s H2: 535 L/s | N2: 760 L/s H2: 1410 L/s | N2: 2130 L/s H2: 3200 L/s |
| 極限壓力 | Ultimate 6.50 x 10-8 mbar 4.88 x 10-8 Torr | Ultimate 6.50 x 10-8 mbar 4.88 x 10-8 Torr | Ultimate 6.50 x 10-8 mbar 4.88 x 10-8 Torr | Ultimate 6.50 x 10-8 mbar 4.88 x 10-8 Torr |
| Foreline 最大壓力 | 3.00 x 100 mbar 2.25 x 100 Torr | 3.00 x 100 mbar 2.25 x 100 Torr | 3.00 x 100 mbar 2.25 x 100 Torr | 3.00 x 100 mbar 2.25 x 100 Torr |
| 冷卻方式(s) | Method Water Water Flow Rate 11.1 gal/hr 42.0 L/hr | Method Water Water Flow Rate 15.9 gal/hr 60.0 L/hr | Method Water Water Flow Rate 30.4 gal/hr 115 L/hr | Method Water Water Flow Rate 47.6 gal/hr 180 L/hr |
| Foreline 法蘭 | KF10 | KF25 | KF25 | KF40 |
| 入口 | ISO63-K | ISO100-K | ISO160-K | ISO250-K |
| 重量Lbs (kg) | 11.0 ( 5.00 ) | 19.9 ( 9.00 ) | 39.7 ( 18.0 ) | 101 ( 46.0 ) |
