| 型號 | EVT1300 | |
| Chamber | Size | Ø330x500mm |
| Material | SUS304 | |
| Window | 4” | |
| Door | Front door | |
| Evaporation source | Tungsten Boat x4 | |
| Film thickness control | Crystal oscillator type film thickness measuring instrument, optional multi-channel film thickness controller | |
| 真空抽氣 | 粗抽pump + turbo pump | |
| 真空度 | ≦5×10-4 Pa (3.75×10-6 torr) | |
| 真空計及顯示器 | 高中低真空計一組 | |
| 控制方式 | PLC ,觸控螢幕 | |
| 電源 | AC220V,50/60Hz | |
| 總功率 | 10kW | |
| 整體尺寸 | 1000mm x 800mm x 1500mm | |
| 重量 | 350kg | |