MODEL	PLD1200
Vacuum Chamber Material	Stainless Steel
Specification	Ø450mm
ultimate vacuum	≦5×10-5Pa
vacuum leakage rate	≦5.0×10-8Pa.I/S
Vacuum Pump	Rotary pump + Turbo pump
Number of Targets	4
Target Size	Φ60mm~Φ25mm
Substrate size	Φ60
Rotation speed of substrate	5~50 rpm
Substrate Heating Maximum Temperature	800ºC±1ºC
Mass flow controller/display	MFC x 2 , / display x1
Vacuum gauge /controller display	Low medium high  1 set
Power	AC220V , 3Φ, 7KW