| Actuator | Manual , Pneumatic |
| Flange | CF63 , CF100 , CF160 ISO63 , ISO100, ISO160 |
| Pressure | Torr 最小值： 7.501 x 10 -11 Torr 最大值： 760 Torr mbar 最小值： 1.000 x 10 -10 mbar 最大值： 1013 mbar |
| Rates | Helium Leak Rate 2.000 x 10-9 mbar*L/s 2.000 x 10-10 Pa*m^3/s 1.980 x 10-7 sccm 1.500 x 10-9 Torr*L/s |
| Temperature | Actuator : 60.0 ºC (140 ºF) Closed Bake : 150 ºC (302 ºF) Open Bake : 200ºC (392ºF) |
| Shaft Seal Material | 300 Series SS Bellows |
| Cycle Life | 10,000 |
| Actuator Type | Manual |
| Max Δ P Before Open | 22.5 Torr |
| Bonnet Seal Typ | Flourocarbon (FKM) Viton |
| Valve Body Materia | 304L SS |
| Valve Seal Material | Flourocarbon (FKM) |
