Manual
Pneumatic
Electromagnetic
| Actuator | Manual , Pneumatic, Electromagnetic |
| Flange | CF16, CF35, CF63 KF16, KF25, KF40, KF50 ISO63 , ISO80, ISO100 |
| Pressure | 7.520 x 10-9 Torr (1.000 x 10-8 mbar) |
| Rates | Leak Rate 2.000 x 10-9 mbar*L/s 1.504 x 10-9 Torr*L/s |
| Temperature | Actuator : 80.0 ºC (176 ºF) Closed Bake : 100 ºC (212 ºF) Open Bake : 100 ºC (212 ºF) |
| Bonnet Seal Type | Flourocarbon (FKM) |
| Valve Body Material | 304L SS |
| Poppet Materia | Flourocarbon (FKM) |
| Shaft Seal | Welded Bellows |