Pump Model | HiPace 30 | HiPace 60P | HiPace 80 | HiPace 80 NEO | HiPace 300 | HiPace 350 | HiPace 450 |
Pumping Speeds | N2: 32.0 L/s He: 24.0 L/s H2: 20.0 L/s Ar: 32.0 L/s | N2: 64.0 L/s He: 48.0 L/s H2: 28.0 L/s Ar: 63.0 L/s | N2: 35.0 – 67.0 L/s He: 41.0 – 58.0 L/s H2: 38.0 – 48.0 L/s Ar: 30.0 – 66.0 L/s | N2: 35.0 – 67.0 L/s He: 41.0 – 58.0 L/s H2: 38.0 – 48.0 L/s Ar: 30.0 – 66.0 L/s | N2: 260 L/s He: 255 L/s H2: 220 L/s Ar: 255 L/s | N2: 300 L/s He: 350 L/s H2: 300 L/s Ar: 270 L/s | N2: 380 L/s He: 380 L/s H2: 330 L/s Ar: 350 L/s |
Ultimate Pressure | 7.50 x 10-8 Torr | 7.50 x 10-7 Torr | ConFlat Flange 3.75 x 10-10 Torr ISO-K Flange 7.50 x 10-7 Torr | ConFlat Flange 3.75 x 10-10 Torr ISO-K Flange 7.50 x 10-7 Tor | ConFlat Flange 3.75 x 10-10 Torr ISO-K Flange 7.50 x 10-8 Torr | ConFlat Flange 3.75 x 10-10 Torr ISO-K Flange 7.50 x 10-8 Torr | ConFlat Flange 3.75 x 10-10 Torr ISO-K Flange 7.50 x 10-8 Torr |
Foreline Flange | DN 16 ISO-KF/G 1/4″ | DN 16 ISO-KF/G 1/4″ | DN 16 ISO-KF | DN 16 ISO-KF | DN 16 ISO-KF | DN 16 ISO-KF | DN 25 ISO-KF |
Inlet Flange | ISO63-K DN63CF (4.50″ OD) | ISO63-K | ISO63-K DN63CF (4.50″ OD) KF40 | KF40 ISO63-K DN63CF (4.50″ OD) | ISO100-K DN100CF (6.00″ OD) | ISO100-K DN100CF (6.00″ OD) | ISO160-K DN160CF (8.00″ OD) |
Weight Lbs (kg) | 4.41 – 7.04 ( 3.20 – 4.41 ) | 4.84 ( 2.20 ) | 5.29 – 8.36 ( 2.40 – 3.80 ) | 3.75 – 6.83 ( 1.70 – 3.10 ) | 14.7 – 19.1 ( 6.70 – 8.70 ) | 17.2 – 23.4 ( 7.80 – 10.6 ) | 16.8 – 25.4 ( 7.60 – 10.6 ) |