The principle of a tube furnace is to utilize resistive heating elements to generate high temperatures (usually >800°C) around the quartz tube, and to perform thermal processing processes such as oxidation, doping, annealing, or chemical vapor deposition (CVD) on wafers or samples in a controlled atmosphere. The key lies in uniform heating, pressure control, and gas flow control to ensure that the material achieves ideal physical or chemical properties.

*The commonly used maximum heating temperature is 1200°C, and the heating zone length is 18″.

The higher temperatures of 1500°C and 1700°C, with heating zones of 28” and 36”, are special products; specifications are available upon request.

Product name/model	Single Zone
Characteristics	① Double-layer steel plate insulation, air-cooled ② Oxygen fiber insulation prevents heat loss ③ Separated upper and lower parts for easy tube replacement
Quartz heating tube (one to choose from) (O.D x I.D x L mm)	60x55x100076x70x100080x72x1000101x92x1000
Power supply	AC 110V/220V 50/60Hz, 20A breaker
Power	3 kw
Heating temperature	1200℃ (under inert gas environment, <1h) 1000℃ (under vacuum environment, continuous) Heating rate: Max. 20℃/min
Length of heating area	440mm
Length of the constant temperature region	150mm (±2℃) heating zone temperature range: —±10℃ (center 320mm) —±5℃ (center 220mm)
Temperature control	PID Programmable Controller with Fault Alarm/Overheat Alarm Temperature Accuracy: ± 1 ℃
Dimensions	Cover height 600mm×450mm×550mm (L x W x H) Cover open 350mm×450mm×mm810 (L x W x H)
Weight	40kg

Product name/model	2 Zones
Characteristics	① Double-layer steel plate insulation, air-cooled ② Oxygen fiber insulation prevents heat loss ③ Separated upper and lower parts for easy tube replacement
Applicable heating tube diameter (ODXIDXL mm)	Quartz tube 60 (60x55x1000) 80 (80x72x1000) 100 (101x92x1000)
Power supply	AC 208-240V 50/60Hz, breaker: 20A
Power	3 KW
Operating temperature	1100℃ (continuous) 1200℃ (<1h) Heating rate: ≤20℃/min.
Length of heating area	432mm (17”) Z1:196mm(7.7”), Z2:196mm(67.7”),
Length of the constant temperature region	Z1,Z2: 150mm (±1℃) When Z1 and Z2 are set at the same temperature: 200mm (±1℃)
Temperature control	2 x PID programmable controllers (one for each zone) with disconnection alarm/over-temperature alarm. Sensor rod: K-type port: RS485 Temperature accuracy: ± 1 °C
Dimensions	Cover closed 645mm×438mm×545mm (L x W x H) Cover open 645mm×585mm×800mm (L x W x H)
Weight	42kg

Product name/model	3 Zones
Characteristics	① Double-layer steel plate insulation, air-cooled ② Oxygen fiber insulation prevents heat loss ③ Separated upper and lower parts for easy tube replacement
Applicable heating tube diameter (ODXIDXL mm)	60 (60x55x1000) 80 (80x72x1000) 100 (101x92x1000)
Power supply	AC 208-240V 50/60Hz 25A Breaker
Power	4 KW
Operating temperature (continuous)	1200°C (under flowing gas <1h) Continuous heating at <1100°C (under vacuum flowing gas) Max. heating rate: 20°C/min.
Length of heating area	450mm (18”) Z1: 152.4mm (6”), Z2: 152.4mm (6”), Z3: 152.4mm (6”)
Length of the constant temperature region	200mm (±1℃)
Temperature control	3 x PID programmable controller (one for each zone) with disconnection alarm/overtemperature alarm.
Dimensions	Cover closed 645mm×410mm×545mm (L x W x H) Cover open 645mm×550mm×800mm (L x W x H)
Weight	45kg