Magnetic spray coating machine

Magnetron Sputtering is a high-efficiency physical vapor deposition (PVD) technology. The principle is to fill an argon-filled chamber with vacuum and apply a high-voltage electric field to ionize the gas into plasma. By applying a magnetic field to the surface of the target, the electron trajectory is restricted, increasing the ionization rate, allowing argon ions to rapidly bombard the target, using momentum transfer to eject the target atoms and deposit them on the substrate to form a thin film.
*Designed and manufactured according to customer requirements (standard products)
| Model | PVD20100 | |
| Carriage | Diameter | Ø150 mm |
| Heating temperature | 500±1 ℃ max., , | |
| Rotation speed | 0-20 rpm | |
| Sputter gun | Target diameter | 2 “Target”, thickness <= 3mm |
| Cooling method | Water-cooled | |
| Chamber | Room size | Ø325mm x 500mm |
| Material of the cavity | SUS304 | |
| Windows | 4” | |
| Introductory paragraph | KF25x2, CF35x2 | |
| Kangmen | The above | |
| Gas supply and distribution | 2 x Mass controller | |
| Vacuum extraction | Rough pump + turbo pump 660 L/S | |
| Vacuum gauge and display | One set of high and low vacuum gauges | |
| Vacuum degree | ≦5×10-4 Pa (3.75×10-6 torr) | |
| Film thickness | Quartz crystal membrane thickness monitor, frequency 0.10 Å | |
| Spattering power supply | RF, DC | |
| Controlling | PLC | |
| Power supply | AC220V, 50/60 Hz | |
| Machine size | 540x540x1000 mm | |
| Weight | 150kg | |
