晶圓乾燥器

| 外部尺寸 (Ø x H) (inch) | 390×460 |
| 內部容量 (L) | 25 |
| 壓力表 (Mpa) | 0 to -0.1 |
| Nozzle (mm, Ø) | 9.4 |
| Net weight (kgs) | 4 |
| Max. permissible vacuum (bodies) | 1.33×10-4 Mpa (1 Torr) |


| 外部尺寸 (Ø x H) (inch) | 390×460 |
| 內部容量 (L) | 25 |
| 壓力表 (Mpa) | 0 to -0.1 |
| Nozzle (mm, Ø) | 9.4 |
| Net weight (kgs) | 4 |
| Max. permissible vacuum (bodies) | 1.33×10-4 Mpa (1 Torr) |
