| Flange / Mounting | CF16,CF35,CF63,CF100 KF16.KF25,KF40,KF50 |
| Window Material | KODIAL, Quartz (Fused Silica), DUV Sapphire , UV Sapphire |
| Flange Material | SUS304L SS |
| Sleeve Material | KOVAR |
| Thermal Range | 0-350℃, Sapphire 0-450℃, 0-200℃(KF) |
| Flange / Mounting | CF16,CF35,CF63,CF100 KF16.KF25,KF40,KF50 |
| Window Material | KODIAL, Quartz (Fused Silica), DUV Sapphire , UV Sapphire |
| Flange Material | SUS304L SS |
| Sleeve Material | KOVAR |
| Thermal Range | 0-350℃, Sapphire 0-450℃, 0-200℃(KF) |