壓力控制器
| 壓力控制器 | |
| 型號 | 651 |
| Valves Operated | 搭配253 Exhaust Throttle Valve |
| Pressure Input Signal | 0-10 VDC, 0-5 VDC, or 0-1 VDC, |
| Input Power Required | 90-132 or 180-264 VAC, 50/60 Hz |
| Set Points | Programmable : 5 External Analog: 1; pressure or position, 0-5 or 0-10 VDC |
| Controller Repeatability | ±0.1% of F.S. |
| Ambient Operating Temperature | 15°-40°C |
| Output Power | Standard: ±15 VDC ±5 @ 0.5 Amp |
| Analog Output Signal | 0-5 or 0-10 VDC for 0-100% valve position and 0-10 VDC for 0-100% F.S. pressure |
| Size | 3-1/2”H x 9-1/2”W x 9”D |
| Display | 2-line LCD with 4-1/2 place readout |
| Display Units | Torr, mTorr, mbar, Pascal, cmH2O, inH2O, µbar, kPa |
| Self-tuning Unit | yes |
| PID Control | yes |
| Interface | Front panel, Analog, TTL (16 inputs, 6 outputs) and RS-232 |
| Relay Outputs | 2, process limits: 24 Volts AC/DC |
| Remote Control Override | yes |
| Position Control Capability | yes |
| Connectors | Valve: 9-pin Type “D” female I/O: 37-pin Type “D” female Transducer: 15-pin Type “D” female RS-232: 9-pin Type “D” male |
| Compliance | CE |
| Exhaust Throttle Valve | |
| 型號 | 253B |
| Differential Pressure Across Valve | 1 atm. (15 psig) max. |
| Driver/Gear Assembly Width | 3.75” square (95 mm) |
| External Leakage at Shaft Seal | 1 x 10-7 scc/sec He |
| Materials Exposed to Process | 316L SS, Viton |
| Heater Operating Temperature | 80° to 90° C |
| Power Input | ±15 VDC, 1 Amp (30 Watts) nominal, usersupplied Note: DC input is used for safety purposes |
| Resolution | Standard: 1/10,000 Fast Motor Option: 1/2800 |
| Shaft Seal | Viton |
| Speed (open to close) | Standard: 7.5 sec Optional: < 2 sec*** |
| Valve Body Operating Temperature | 0° to 90° C (32° to 194° F) max. |
| Valve Motor Ambient Operating Temperature | 0° to 70° C (32° to 158° F) max. |
| Warm-up Time | 1 hour to 80° C (176° F), 2 hours to steady sta |
| 型式 | U626B | U622B | |
| 測量方式 | Baratron Type | ||
| Full Scale Range (Torr) | 0.10 (626B only), 0.25 (626B only), 1, 2, 10, 20, 100, 1000 | ||
| 精度 | 0.25% of Reading | ||
| 輸入電源 | ±15 VDC (±5%) @ 35 mA | ||
| 輸出 | 0 to +10 VDC into ≥ 10K ohm load | ||
| 接線端口 | 15 pin Type D | 5-post terminal block | |
| 真空接口 | 1/2” tabulation , KF16 | ||
| 使用溫度 | 0 ~50℃ | ||
| 型號 | T2BA |
| Accuracy | 0.25% of set point, or 5mV |
| Control Range | 0.0001%-100% FS |
| Operating Temperature | |
| Motor and Electronics | 15° to 50°C |
| Valve Body | 105°C standard, 150°C and 200°C optional |
| Storage Temperature | -20° to 80°C |
| External Leak Rate | 1 e-9 atm*cc/sec |
| Valve Power | 24 VDC @ < 100 W max. 4A |
| Valve Sizes | KF40, KF50, NW63, NW80 and NW100 |
| Heatability | 105°C standard or optionally 150°C or 200°C. |
| 型號 | PRCO11 |
| 接口 | KF16,KF25,KF40,KF50 CF1.33”, CF2.12”,CF2.75”,CF3.38” |
| 最低真空度 / 最大使用壓力值 | 3×10-8 Torr / 15 psig |
| Conductance | KF16/CF1.33” : 3 liters/sec KF25/CF2.12” : 10 liters/sec KF40/CF2.75” : 30 liters/sec KF50/CF3.38” : 85 liters/sec |
| 操作溫度 | 0℃ ~ 50℃ |
| 控制方式 | 手動: 機上控制按鈕 |
| 遠端: RS-232 控制 | |
| 洩漏率 | 1×10-9 std cc/sec |
| 材質(真空內) | 本體: SS304L , 密封: 氟橡膠 |
| 輸入電壓 | 12 VDC(附AC110V to 12VDC變壓器) |
| 最大電流 | 0.47A |
