| MODEL | PLD1200 |
| Vacuum Chamber Material | Stainless Steel |
| Specification | Ø450mm |
| ultimate vacuum | ≦5×10-5Pa |
| vacuum leakage rate | ≦5.0×10-8Pa.I/S |
| Vacuum Pump | Rotary pump + Turbo pump |
| Number of Targets | 4 |
| Target Size | Φ60mm~Φ25mm |
| Substrate size | Φ60 |
| Rotation speed of substrate | 5~50 rpm |
| Substrate Heating Maximum Temperature | 800ºC±1ºC |
| Mass flow controller/display | MFC x 2 , / display x1 |
| Vacuum gauge /controller display | Low medium high 1 set |
| Power | AC220V , 3Φ, 7KW |