質量流量計
型號	5850E
流量範圍	3sccm~30slpm
精密度	±1% ±1.5% 範圍>20slpm
重覆精密度	0.25%
反應時間	<3sec
電源(NC/NO VALVE)	±15VDC
環境溫度	5℃~65℃
工作壓力	1500 psi (max.)
壓力差	5-50 psi
輸出訊號	0-5Vdc
5 Volt 參考電壓輸出	5 Volts ±0.2%
輸入訊號	0-5Vd 輸入阻抗200kΩ
電氣接頭	15 pin DSUB
進出口接頭	VCR1/4”(公),1/4”Swagelok

Model	PC-510
MFC control	Single channel Power voltage: +15±0.5Vdc/300mA max.             -15±0.5Vdc/300mA max. Set point output: 0-5 Vdc@5Ma Flow input: 0-5 Vdc Connector: D-type 9-pin female connector
Shutoff  valve	Single channel Power output: +24Vdc/800mA max.
Power	90 ~ 260 Vac, 30W 47 ~ 63 Hz
Dimensions	96 x 96 x 222 mm
Weight	1172g
Panel Cutout	1/4DIN cutout(92+0.8 mm x 92+0.8mm)

Model	PC-540
MFC control	Four channel Power voltage: +15±0.5Vdc/1A max.             -15±0.5Vdc/1A max. Set point output: 4 x 0-5 Vdc@5Ma Flow input: 4 x 0-5 Vdc Connector: 4 x D-type 9-pin female connector
Display	4 x 3 1/2 digit red LED
Remote	Independent control for four channel MFC Remote set point input — 0-5Vdc into 100K ohms load Remote flow monitor output –0-5Vdc@5mA Remote set point enable—TTL active low Remote gas on – TTL active low Remote purge – Dry contact for MFC purge Connector – D-type 37-pin female connector
Shutoff  valve	Four channel +24Vdc/600mA (total rating of 2.4 Amp max)
Power	90 ~ 260 Vac, 10W 47 ~ 63 Hz
Dimensions	88 x 485 x 260 mm
Weight	4150g