{"id":3112,"date":"2026-01-27T11:32:21","date_gmt":"2026-01-27T11:32:21","guid":{"rendered":"https:\/\/yiyidouble.com\/?page_id=3112"},"modified":"2026-02-12T06:05:14","modified_gmt":"2026-02-12T06:05:14","slug":"%e7%88%90%e7%ae%a1","status":"publish","type":"page","link":"https:\/\/yiyidouble.com\/english\/%e7%88%90%e7%ae%a1\/","title":{"rendered":"Burner tube"},"content":{"rendered":"

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The principle of a tube furnace is to utilize resistive heating elements to generate high temperatures (usually >800\u00b0C) around the quartz tube, and to perform thermal processing processes such as oxidation, doping, annealing, or chemical vapor deposition (CVD) on wafers or samples in a controlled atmosphere. The key lies in uniform heating, pressure control, and gas flow control to ensure that the material achieves ideal physical or chemical properties.<\/p>\n\n\n\n

*The commonly used maximum heating temperature is 1200\u00b0C, and the heating zone length is 18\u2033.<\/p>\n\n\n\n

The higher temperatures of 1500\u00b0C and 1700\u00b0C, with heating zones of 28\u201d and 36\u201d, are special products; specifications are available upon request.<\/p>\n\n\n\n

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Product name\/model<\/td>Single Zone<\/td><\/tr>
Characteristics<\/td>\u2460 Double-layer steel plate insulation, air-cooled \u2461 Oxygen fiber insulation prevents heat loss \u2462 Separated upper and lower parts for easy tube replacement<\/td><\/tr>
Quartz heating tube (one to choose from) (O.D x I.D x L mm)<\/td>60x55x100076x70x100080x72x1000101x92x1000<\/td><\/tr>
Power supply<\/td>AC 110V\/220V 50\/60Hz, 20A breaker<\/td><\/tr>
Power<\/td>3 kw<\/td><\/tr>
Heating temperature<\/td>1200\u2103 (under inert gas environment, <1h) 1000\u2103 (under vacuum environment, continuous) Heating rate: Max. 20\u2103\/min<\/td><\/tr>
Length of heating area<\/td>440mm<\/td><\/tr>
Length of the constant temperature region<\/td>150mm (\u00b12\u2103) heating zone temperature range: \u2014\u00b110\u2103 (center 320mm) \u2014\u00b15\u2103 (center 220mm)<\/td><\/tr>
Temperature control<\/td>PID Programmable Controller with Fault Alarm\/Overheat Alarm Temperature Accuracy: \u00b1 1 \u2103<\/td><\/tr>
Dimensions<\/td>Cover height 600mm\u00d7450mm\u00d7550mm (L x W x H) Cover open 350mm\u00d7450mm\u00d7mm810 (L x W x H)<\/td><\/tr>
Weight<\/td>40kg<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

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Product name\/model<\/td>2 Zones<\/td><\/tr>
Characteristics<\/td>\u2460 Double-layer steel plate insulation, air-cooled \u2461 Oxygen fiber insulation prevents heat loss \u2462 Separated upper and lower parts for easy tube replacement<\/td><\/tr>
Applicable heating tube diameter (ODXIDXL mm)<\/td>Quartz tube 60 (60x55x1000) 80 (80x72x1000) 100 (101x92x1000)<\/td><\/tr>
Power supply<\/td>AC 208-240V 50\/60Hz, breaker: 20A<\/td><\/tr>
Power<\/td>3 KW  <\/td><\/tr>
Operating temperature<\/td>1100\u2103 (continuous) 1200\u2103 (<1h) Heating rate: \u226420\u2103\/min.<\/td><\/tr>
Length of heating area<\/td>432mm (17\u201d) Z1:196mm(7.7\u201d), Z2:196mm(67.7\u201d),<\/td><\/tr>
Length of the constant temperature region<\/td>Z1,Z2: 150mm (\u00b11\u2103) When Z1 and Z2 are set at the same temperature: 200mm (\u00b11\u2103)<\/td><\/tr>
Temperature control<\/td>2 x PID programmable controllers (one for each zone) with disconnection alarm\/over-temperature alarm. Sensor rod: K-type port: RS485 Temperature accuracy: \u00b1 1 \u00b0C<\/td><\/tr>
Dimensions<\/td>Cover closed 645mm\u00d7438mm\u00d7545mm (L x W x H) Cover open 645mm\u00d7585mm\u00d7800mm (L x W x H)<\/td><\/tr>
Weight<\/td>42kg<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

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Product name\/model<\/td>3 Zones<\/td><\/tr>
Characteristics<\/td>\u2460 Double-layer steel plate insulation, air-cooled \u2461 Oxygen fiber insulation prevents heat loss \u2462 Separated upper and lower parts for easy tube replacement<\/td><\/tr>
Applicable heating tube diameter (ODXIDXL mm)<\/td>60 (60x55x1000) 80 (80x72x1000) 100 (101x92x1000)<\/td><\/tr>
Power supply<\/td>AC 208-240V 50\/60Hz 25A Breaker<\/td><\/tr>
Power<\/td>4 KW<\/td><\/tr>
Operating temperature (continuous)<\/td>1200\u00b0C (under flowing gas <1h) Continuous heating at <1100\u00b0C (under vacuum flowing gas) Max. heating rate: 20\u00b0C\/min.<\/td><\/tr>
Length of heating area<\/td>450mm (18\u201d) Z1: 152.4mm (6\u201d), Z2: 152.4mm (6\u201d), Z3: 152.4mm (6\u201d)<\/td><\/tr>
Length of the constant temperature region<\/td>200mm (\u00b11\u2103)<\/td><\/tr>
Temperature control<\/td>3 x PID programmable controller (one for each zone) with disconnection alarm\/overtemperature alarm.<\/td><\/tr>
Dimensions<\/td>Cover closed 645mm\u00d7410mm\u00d7545mm (L x W x H) Cover open 645mm\u00d7550mm\u00d7800mm (L x W x H)<\/td><\/tr>
Weight<\/td>45kg<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

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<\/p>","protected":false},"excerpt":{"rendered":"

\u7210\u7ba1\uff08Tube Furnace\uff09\u539f\u7406\u662f\u5229\u7528\u96fb\u963b\u52a0\u71b1\u5143\u4ef6\u5728\u77f3\u82f1\u7ba1\u5468\u570d\u7522\u751f\u9ad8\u6eab\uff08\u901a\u5e38>800\u2103\uff09\uff0c […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-3112","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/pages\/3112","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/comments?post=3112"}],"version-history":[{"count":24,"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/pages\/3112\/revisions"}],"predecessor-version":[{"id":3395,"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/pages\/3112\/revisions\/3395"}],"wp:attachment":[{"href":"https:\/\/yiyidouble.com\/english\/wp-json\/wp\/v2\/media?parent=3112"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}