{"id":371,"date":"2024-09-20T02:55:10","date_gmt":"2024-09-20T02:55:10","guid":{"rendered":"https:\/\/yiyidouble.com\/?page_id=371"},"modified":"2026-02-08T15:21:14","modified_gmt":"2026-02-08T15:21:14","slug":"pecvd","status":"publish","type":"page","link":"https:\/\/yiyidouble.com\/en\/pecvd\/","title":{"rendered":"PECVD"},"content":{"rendered":"

<\/p>\n\n\n\n

\n
\n
\"\"<\/figure>\n<\/div>\n\n\n\n
\n

PECVD\uff08\u96fb\u6f3f\u589e\u5f37\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d\uff09\u662f\u4e00\u7a2e\u5728\u4f4e\u6eab\u4e0b\uff08\u901a\u5e38\u6eab\u5ea6<400\u2103\uff09\uff0c\u5229\u7528\u96fb\u6f3f\uff08Plasma\uff09\u80fd\u91cf\u5206\u89e3\u53cd\u61c9\u6c23\u9ad4\uff0c\u5728\u57fa\u677f\u8868\u9762\u53cd\u61c9\u5f62\u6210\u56fa\u614b\u8584\u819c\u7684\u6280\u8853\u3002\u5176\u6838\u5fc3\u539f\u7406\u662f\u900f\u904e\u5c04\u983b\uff08RF\uff09\u6216\u5fae\u6ce2\u5c07\u6c23\u9ad4\u96fb\u96e2\u6210\u9ad8\u6d3b\u6027\u7684\u96fb\u5b50\u3001\u96e2\u5b50\u8207\u81ea\u7531\u57fa\uff0c\u85c9\u7531\u9019\u4e9b\u9ad8\u80fd\u6d3b\u6027\u7c92\u5b50\u5728\u57fa\u677f\u8868\u9762\u767c\u751f\u5316\u5b78\u53cd\u61c9\u751f\u6210\u8584\u819c\uff0c\u4e0d\u50c5\u80fd\u5728\u4f4e\u6eab\u4e0b\u9032\u884c\uff0c\u9084\u5177\u5099\u9ad8\u6c88\u7a4d\u901f\u7387\u8207\u826f\u597d\u7684\u819c\u5c64\u5747\u52fb\u6027\u3002<\/p>\n\n\n\n

\u203bPECVD\u4f9d\u7167\u5ba2\u6236\u9700\u6c42\u8a2d\u8a08\u88fd\u9020(\u5b9a\u88fd\u54c1)<\/p>\n<\/div>\n<\/div>\n\n\n\n

<\/p>\n\n\n\n

\u578b\u865f<\/td>PEC1200<\/td><\/tr>
\u8154\u9ad4\u5c3a\u5bf8<\/td>\u00d8350mm X 400mm (SUS304 )\u56db\u9762\u6c34\u51b7\u5faa\u74b0\u69fd(BAFFLE)<\/td><\/tr>
\u8154\u9580\/\u8996\u7a97<\/td>\u524d\u958b\u5f0f \/  4\u201d<\/td><\/tr>
SHOWER<\/td>6\u201d<\/td><\/tr>
\u771f\u7a7a\u5ea6<\/td>\u22665×10-4 Pa (3.75×10-6 torr)<\/td><\/tr>
\u5de5\u4f5c\u58d3\u529b<\/td>9.9X10-4<\/sup> ~ 10 Torr<\/td><\/tr>
  \u8f09\u53f0<\/td>\u76f4\u5f91<\/td>4\u201d<\/td><\/tr>
\u52a0\u71b1<\/td>500\u2103<\/td><\/tr>
\u65cb\u8f49<\/td>0-20 RPM<\/td><\/tr>
\u4e0a\u4e0b<\/td>\u99ac\u9054\u5347\u964d\u884c\u7a0b100mm<\/td><\/tr>
\u96fb\u6f3f\u96fb\u6e90\u4f9b\u61c9\u5668<\/td>RF 600W<\/td><\/tr>
\u771f\u7a7a\u6cf5\u6d66<\/td>\u6cb9\u8ff4\u8f49\u6cf5\u6d66 , TURBO PUMP<\/td><\/tr>
\u771f\u7a7a\u8a08\u53ca\u986f\u793a\u5668<\/td>\u9ad8\u4e2d\u4f4e\u771f\u7a7a\u8a08\u4e00\u7d44<\/td><\/tr>
\u8cea\u91cf\u6d41\u91cf\u8a08\u53ca\u986f\u793a\u5668<\/td>\u63a7\u5236\u56683 \u7d44  \u986f\u793a\u56681\u7d44<\/td><\/tr>
\u63a7\u5236\u65b9\u5f0f<\/td>PLC + \u89f8\u63a7\u87a2\u5e55<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

<\/p>","protected":false},"excerpt":{"rendered":"

PECVD\uff08\u96fb\u6f3f\u589e\u5f37\u5316\u5b78\u6c23\u76f8\u6c89\u7a4d\uff09\u662f\u4e00\u7a2e\u5728\u4f4e\u6eab\u4e0b\uff08\u901a\u5e38\u6eab\u5ea6<400\u2103\uff09\uff0c\u5229\u7528\u96fb\u6f3f\uff08Plasma […]<\/p>","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-371","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/pages\/371","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/comments?post=371"}],"version-history":[{"count":9,"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/pages\/371\/revisions"}],"predecessor-version":[{"id":3329,"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/pages\/371\/revisions\/3329"}],"wp:attachment":[{"href":"https:\/\/yiyidouble.com\/en\/wp-json\/wp\/v2\/media?parent=371"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}